Beamfox - Proximity effect correction for electron-beam lithography - About
The story of Beamfox began in 2014 when Leonardo Midolo and Søren Stobbe were developing novel quantum nanocomponents at the Niels Bohr Institute in Copenhagen. Beamfox Technologies develops and commercializes software solutions for proximity effect correction in the R&D market. Beamfox Proximity provides a simple and user-friendly interface to our state-of-the-art proximity effect correction algorithm. Beamfox Proximity provides state-of-the-art proximity effect correction for electron-beam lithography in a user-friendly software package. Beamfox Proximity is the most user-friendly proximity effect correction solution on the market and integrates seamlessly with electron-beam writers from Elionix Inc., Raith systems compatible with the CSF format, and supports all electron-beam writers through layered GDS. Although electron-beam lithography is the state-of-the-art method for high-resolution lithography, the method is inherently limited by backscattering of electrons, leading to unwanted exposures and deformed nanostructures. In 2016, Leonardo and Søren teamed up with Anders Esbensen and founded Beamfox Technologies to develop our first product: Beamfox Proximity. Leonardo is a young scientist and entrepreneur with a passion for nanotechnology, photonics, and software.
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Beamfox - Technology - Electron-beam lithography and proximity effects
Electron-beam lithography is the state-of-the-art method for high-resolution nanofabrication. With an electron beam waist of less than a nanometer, intricate nanoscale patterns can be written in electron-sensitive resists. Unfortunately, the electrons scatter off the resist and the substrate, which results in unwanted exposures known as proximity effect errors. An example is a grating within an exposed region as shown to the right. If a constant exposure time is applied (BEFORE, blue region), the actual electron dose varies dramatically across the device and the result shown in the SEM image shows detrimental device failure.
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Where is Beamfox Technologies ApS located?
The company Beamfox Technologies ApS is located in Copenhagen, Capital Region of Denmark, Denmark. It's worth noting that the company may has more corporate locations
How many employees does Beamfox Technologies ApS approximately have?
As of the latest available information Beamfox Technologies ApS has around 1-10 employees worldwide.
When was Beamfox Technologies ApS founded?
Beamfox Technologies ApS was founded in 2016
In which industries does Beamfox Technologies ApS mainly work?
The company Beamfox Technologies ApS has it's main focus in the industries of Science and Engineering
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